The influence of friction surface machining technology SMAT on properties of electrodeposited copper layers

Main Article Content

S. I. Derevyanko
V. M. Tyutenko
Ya. D. Korol
Yu. О. Lyashenko

Abstract

This paper describes an experimental setup for SMAT treatment of surfaces of polycrystalline and electrodeposited copper. The impact of the SMAT treatment on the surface condition of the cold-rolled copper plates and electrodeposited Cu films was demonstrated by the micro hardness measurements. The XRD measurements of the elaborated surfaces was also performed.

Diffraction patterns of the initial cold-rolled copper and the same copper plate processed by SMAT were compared with diffraction patterns of the annealed copper powder. It was shown that the axial <220> texture, which is characteristic for the the surface layer of the rolled copper disappears after SMAT-processing and diffraction pattern becomes similar to the diffraction pattern of the polycrystalline copper.

The same phenomena was observed for the SMAT-processed electroplated copper layers with a thickness of 70 μm. It was found that electroplated copper layer consists of microcrystals with principal (220) orientation of the atomic planes parallel to the sample surface. This axial texture dissapears after SMAT-processing and electroplated surface layer demonstrates properties of polycristalline copper.

Article Details

Section
Materials Physics

References

Mazilkin A. A., Straumal B. B., Protasova S. G. (2007) Strukturnyie izmeneniya v

alyuminievyih splavah pri intensivnoy plasticheskoy deformatsii. FTT, 49. 824-829 (in Rus).

Wang J. T., Du Z. Z., Kang F., Chen G. (2006) Heterogeneity and anisotropy in

properties of Copper processed by equal channel angular pressing. Materials Science Forum,

-504, 663-668.

Prokopenko G. I., Voloshko S. M., Kotenko I. E., Burmak A. P. (2009) Zmina

mikrotverdosti alyuminievogo splavu D16 pislya ultrazvukovoyi udarnoyi obrobki. Naukovi

visti NTUU "KPI", 3, 42-46.

Lu K., Lu J. (1999). Surface nanocrystallization (SNC) of metallic materialspresentation

of the concept behind a new approach. J Mater Sci Technol, 15, 193.

Lu K., Lu J. (2004) Nanostructured surface layer on metallic materials induced by

surface mechanical attrition treatment. Mat. Sci. Eng.: A, 375-377, 38-45.

Zhang Y. S., Han Z., Wang K., Lu K. (2006) Friction and wear behaviors of

nanocrystalline surface layer of pure copper. Wear 260, 942-948.

Chan H. (2009) Development of SMAT and electrodeposition process for generating

nanostructured materials and study of their tensile properties. The Hong Kong Polytechnic

University. 21, 190.

Blonde R., Chan H., Allain-Bonasso N., Bolle B., Grosdidier T., Lu J. (2010)

Evolution of texture and microstructure in pulsed electro-deposited Cu treated by Surface

Mechanical Attrition Treatment (SMAT). Journal of Alloys and Compounds. 504, 410-413

Chen C., Yu D., Chen K. N. (2015). Vertical interconnects of microbumps in 3D

integration. MRS Bulletin, 40(03), 257-263

Li J. F., Agyakwa P. A., Johnson C. M. (2011). Interfacial reaction in Cu/Sn/Cu

system during the transient liquid phase soldering process. Acta Materialia, 59(3), 1198-1211.