MODELING OF PATTERN FORMATION OF THE ORDERED INTERMEDIATE PHASES DURING CO-DEPOSITION OF BINARY THIN FILM
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Abstract
Formation of the intermediate phase patterns in the thin-film co-deposition process is simulated using the Stochastic Kinetic Mean-Field method and Monte Carlo. Three basic morphologies of the 2D sections are distinguished: (1) spots (rod-like in 3D), (2) layered structures-lamellae, zigzags, and labyrinths (plate-like in 3D), and (3) net-like structures (inverse to spot-like structures, when spots become majority and the surrounding matrix becomes a minority). They are characterized and distinguished with the help of only one special topological parameter.
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